by Pawiak, B. J., Felch, S. B., Jones, K.S.

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ISBN-13: 9781558998681
ISBN: 1558998683
Publication Date: 2009
Publisher: Materials Research Society

AUTHOR

Pawiak, B. J., Felch, S. B., Jones, K.S.

SUMMARY

This volume from the 2006 MRS Spring Meeting focuses on fundamental materials science and device research for current transistor technologies. Materials scientists come together with silicon technologists and TCAD researchers and activation technologies for integrated circuits, to discuss current achievements research directions.Pawiak, B. J. is the author of 'Doping Engineering for Device Fabrication', published 2009 under ISBN 9781558998681 and ISBN 1558998683.

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